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Festo 8203266 Mass flow controller (MFC) VEFC
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Festo

8203266

Mass flow controller (MFC) VEFC

The Festo part number 8203266 is an electrically actuated 2-way proportional flow control valve featuring a non-reversible flow direction and a flow rate control range of 5 l/min to 200 l/min (N2 equivalent). It operates at an operating pressure of 0.6 MPa (6 bar), an overload pressure of 0.8 MPa (8 bar / 116 psi), and a burst pressure of 2.1 MPa (21 bar / 305 psi), with an IP20 degree of protection and vacuum suitability. This unit accommodates inlet pressures from 0.1 MPa to 0.7 MPa (1 bar to 7 bar / 14.5 psi to 101.5 psi) and output pressures from -0.1 MPa to 0.35 MPa (-1 bar to 3.5 bar / -14.5 psi to 50.8 psi) via G1/4, R1/4, QS-8, QS-10, or front metal seal 1/4" pneumatic connections. Submit the exact part number, quantity, and application requirements to receive a formal quotation.

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Manufacturer
Festo
Part number
8203266
Data verification
Manufacturer evidence reviewed

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Exact part-number verificationTechnical properties are matched to 8203266.
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Manufacturer documentationA document is added when the reviewed source provides one.

Verified configuration

Technical Specifications

Degree of protection
IP20
Flow rate control range
5 l/min...200 l/min
Note on the ow rate control range
N2 equivalent, the specied dynamic and accuracy values apply to | setpoint values >10 %FS
Flow direction
Non-reversible
Operating pressure
0.6 MPa | 6 bar
Overload pressure
0.8 MPa | 8 bar | 116 psi
Burst pressure
2.1 MPa | 21 bar | 305 psi
Inlet pressure 1 MPa
0.1 MPa...0.7 MPa
Inlet pressure 1
1 bar...7 bar
Inlet pressure 1 psi
14.5 psi...101.5 psi
Output pressure 2
-0.1 MPa...0.35 MPa | -14.5 psi...50.8 psi
Outlet pressure 2
-1 bar...3.5 bar
Suitability for vacuum
Yes
Valve function
2-way proportional ow control valve
Actuation type
Electrical
Pneumatic connection 1
G1/4 | R1/4 | QS-8 | QS-10 | front metal seal 1/4"
Pneumatic connection 2
G1/4 | R1/4 | QS-8 | QS-10 | front metal seal 1/4"
Total leakage
0.6 l/h
Note on total leakage
standardized according to SEMI E16 tested with CDA
Relative air humidity
5 - 85% | Non-condensating

Engineering context

Identification and RFQ Guidance

Confirm the exact configuration

Use the manufacturer part number and model code—not appearance alone. Connection, size, material, voltage, pressure, seal, and control options can differ within the same product family.

What to include in your RFQ

Provide quantity, delivery country and ZIP/postal code, required condition, target date, and photographs of the existing nameplate when available.

Technical verification

Our sourcing response is prepared against Festo 8203266. Final compatibility remains subject to the machine manufacturer’s requirements and complete application data.