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Festo 8204590 Mass flow controller (MFC) VEFC-L-6-100-D31-MFS14-MFS14-MRM1
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Festo

8204590

Mass flow controller (MFC) VEFC-L-6-100-D31-MFS14-MFS14-MRM1

The Festo part number 8204590 is a 2-way proportional flow control valve featuring electrical actuation and a non-reversible flow direction for an $N_2$ equivalent flow rate control range of 5 l/min to 100 l/min, where specified dynamic and accuracy values apply to setpoint values greater than 10% FS. It operates at an operating pressure of 0.6 MPa (6 bar) with an inlet pressure range of 0.1 MPa to 0.7 MPa (1 bar to 7 bar / 14.5 psi to 101.5 psi), an outlet pressure 2 range of -0.1 MPa to 0.35 MPa (-1 bar to 3.5 bar / -14.5 psi to 50.8 psi), an overload pressure of 0.8 MPa (8 bar / 116 psi), and a burst pressure of 2.1 MPa (21 bar / 305 psi). This IP20-rated component includes 1/4" front metal seal pneumatic connections for ports 1 and 2, supports vacuum applications, exhibits a total leakage of 0.6 l/h standardized according to SEMI E16 and tested with CDA, and functions within a relative air humidity of 5 to 85% non-condensating. Submit the exact part number, quantity, and application requirements to receive a quote.

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Manufacturer
Festo
Part number
8204590
Data verification
Manufacturer evidence reviewed

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Verified configuration

Technical Specifications

Degree of protection
IP20
Flow rate control range
5 l/min...100 l/min
Note on the ow rate control range
N2 equivalent, the specied dynamic and accuracy values apply to | setpoint values >10 %FS
Flow direction
Non-reversible
Operating pressure
0.6 MPa | 6 bar
Overload pressure
0.8 MPa | 8 bar | 116 psi
Burst pressure
2.1 MPa | 21 bar | 305 psi
Inlet pressure 1 MPa
0.1 MPa...0.7 MPa
Inlet pressure 1
1 bar...7 bar
Inlet pressure 1 psi
14.5 psi...101.5 psi
Output pressure 2
-0.1 MPa...0.35 MPa | -14.5 psi...50.8 psi
Outlet pressure 2
-1 bar...3.5 bar
Suitability for vacuum
Yes
Valve function
2-way proportional ow control valve
Actuation type
Electrical
Pneumatic connection 1
front metal seal 1/4"
Pneumatic connection 2
front metal seal 1/4"
Total leakage
0.6 l/h
Note on total leakage
standardized according to SEMI E16 tested with CDA
Relative air humidity
5 - 85% | Non-condensating
Climatic category
3K22 as per EN 60721
Nominal altitude of use above sea level
<= 2000 m NHN
Operating medium
Compressed air as per ISO 8573-1:2010 [7:4:4] | Inert gases
Temperature of medium
5 °C...50 °C
Ambient temperature
5 °C...50 °C

Engineering context

Identification and RFQ Guidance

Confirm the exact configuration

Use the manufacturer part number and model code—not appearance alone. Connection, size, material, voltage, pressure, seal, and control options can differ within the same product family.

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Provide quantity, delivery country and ZIP/postal code, required condition, target date, and photographs of the existing nameplate when available.

Technical verification

Our sourcing response is prepared against Festo 8204590. Final compatibility remains subject to the machine manufacturer’s requirements and complete application data.