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Festo 8204591 Mass flow controller (MFC) VEFC-L-6-100-D31-Q10-Q10-MRM1
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Festo

8204591

Mass flow controller (MFC) VEFC-L-6-100-D31-Q10-Q10-MRM1

Festo Mass flow controller (MFC) VEFC-L-6-100-D31-Q10-Q10-MRM1, part number 8204591, is documented in the official Festo United States product data sheet. Review the technical specifications and operating conditions below when requesting a quotation.

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Manufacturer
Festo
Part number
8204591
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Technical Specifications

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Degree of protection
IP20
Flow rate control range
5 l/min...100 l/min
Note on the ow rate control range
N2 equivalent, the specied dynamic and accuracy values apply to | setpoint values >10 %FS
Flow direction
Non-reversible
Operating pressure
0.6 MPa | 6 bar
Overload pressure
0.8 MPa | 8 bar | 116 psi
Burst pressure
2.1 MPa | 21 bar | 305 psi
Inlet pressure 1 MPa
0.1 MPa...0.7 MPa
Inlet pressure 1
1 bar...7 bar
Inlet pressure 1 psi
14.5 psi...101.5 psi
Output pressure 2
-0.1 MPa...0.35 MPa | -14.5 psi...50.8 psi
Outlet pressure 2
-1 bar...3.5 bar
Suitability for vacuum
Yes
Valve function
2-way proportional ow control valve
Actuation type
Electrical
Pneumatic connection 1
QS-10
Pneumatic connection 2
QS-10
Total leakage
0.6 l/h
Note on total leakage
standardized according to SEMI E16 tested with CDA
Relative air humidity
5 - 85% | Non-condensating
Climatic category
3K22 as per EN 60721
Nominal altitude of use above sea level
<= 2000 m NHN
Operating medium
Compressed air as per ISO 8573-1:2010 [7:4:4] | Inert gases
Temperature of medium
5 °C...50 °C
Ambient temperature
5 °C...50 °C

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Our sourcing response is prepared against Festo 8204591. Final compatibility remains subject to the machine manufacturer’s requirements and complete application data.