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Festo
8204591
Mass flow controller (MFC) VEFC-L-6-100-D31-Q10-Q10-MRM1
The Festo 8204591 is an electrically actuated 2-way proportional flow control valve featuring an IP20 degree of protection, a non-reversible flow direction, and QS-10 pneumatic connections for both ports 1 and 2. This component delivers a flow rate control range of 5 l/min to 100 l/min (N2 equivalent, with dynamic and accuracy values applying to setpoint values greater than 10% FS) alongside a total leakage of 0.6 l/h standardized according to SEMI E16 tested with CDA in relative air humidity of 5 to 85% non-condensating. It operates at 0.6 MPa (6 bar) with an inlet pressure range of 0.1 MPa to 0.7 MPa (1 bar to 7 bar; 14.5 psi to 101.5 psi), an output pressure 2 range of -0.1 MPa to 0.35 MPa (-1 bar to 3.5 bar; -14.5 psi to 50.8 psi), an overload pressure of 0.8 MPa (8 bar; 116 psi), and a burst pressure of 2.1 MPa (21 bar; 305 psi) while maintaining suitability for vacuum. Submit the exact part number, quantity, and application requirements to receive a formal quotation.
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- Manufacturer
- Festo
- Part number
- 8204591
- Data verification
- Manufacturer evidence reviewed
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Exact part-number verificationTechnical properties are matched to 8204591.
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Manufacturer documentationA document is added when the reviewed source provides one.
Verified configuration
Technical Specifications
- Degree of protection
- IP20
- Flow rate control range
- 5 l/min...100 l/min
- Note on the ow rate control range
- N2 equivalent, the specied dynamic and accuracy values apply to | setpoint values >10 %FS
- Flow direction
- Non-reversible
- Operating pressure
- 0.6 MPa | 6 bar
- Overload pressure
- 0.8 MPa | 8 bar | 116 psi
- Burst pressure
- 2.1 MPa | 21 bar | 305 psi
- Inlet pressure 1 MPa
- 0.1 MPa...0.7 MPa
- Inlet pressure 1
- 1 bar...7 bar
- Inlet pressure 1 psi
- 14.5 psi...101.5 psi
- Output pressure 2
- -0.1 MPa...0.35 MPa | -14.5 psi...50.8 psi
- Outlet pressure 2
- -1 bar...3.5 bar
- Suitability for vacuum
- Yes
- Valve function
- 2-way proportional ow control valve
- Actuation type
- Electrical
- Pneumatic connection 1
- QS-10
- Pneumatic connection 2
- QS-10
- Total leakage
- 0.6 l/h
- Note on total leakage
- standardized according to SEMI E16 tested with CDA
- Relative air humidity
- 5 - 85% | Non-condensating
- Climatic category
- 3K22 as per EN 60721
- Nominal altitude of use above sea level
- <= 2000 m NHN
- Operating medium
- Compressed air as per ISO 8573-1:2010 [7:4:4] | Inert gases
- Temperature of medium
- 5 °C...50 °C
- Ambient temperature
- 5 °C...50 °C
Engineering context
Identification and RFQ Guidance
What to include in your RFQ
Provide quantity, delivery country and ZIP/postal code, required condition, target date, and photographs of the existing nameplate when available.
Technical verification
Our sourcing response is prepared against Festo 8204591. Final compatibility remains subject to the machine manufacturer’s requirements and complete application data.